The metal sputtering target

Development trend of target technology

High purity metal sputtering target material is mainly used in wafer manufacturing and advanced packaging process. Taking chip manufacturing as an example, we can see that from a silicon chip to a chip needs to go through seven production processes, namely diffusion (ThermalProcess), photolithography (Etch), ion implantation (I)OnImplant), DielectricDeposition, chemical mechanical polishing (CMP), Metalization, each link needs to use equipment, materials and process corresponding to one by one.Sputtering target is used in the process of "metallization", through the thin film deposition equipment using high-energy particles to bombard the target and then form a specific function of the metal layer on the silicon chip, such as conductive layer, barrier layer, etc.

The development trend of sputtering target technology is closely related to the technological innovation in the downstream application field. With the technological progress of the application market in thin film products or components, the sputtering target also needs to change accordingly.

In the downstream application fields, the semiconductor industry has the highest quality requirements for sputtering target and sputtering film. With the manufacture of larger size silicon wafers, the sputtering target is also required to develop in the direction of larger size. At the same time, it also puts forward higher requirements for the control of sputtering target grain.

The purity of the sputtering film is closely related to the purity of the sputtering target. In order to meet the needs of higher precision and finer micron semiconductor technology, the purity of the sputtering target is increasing, and even reaches 99.9999%(6N) purity.

Target materials as a strategic emerging industry to focus on encouraging the development, and issued industrial policies," the 13th Five-Year plan "proposed that by 2020, the self-sufficiency rate of major and key materials to achieve more than 70%, the initial realization of China's strategic transformation from a material country to a material power.At present, Chinese enterprises have made breakthroughs in the field of target materials. Under the current economic background, domestic target materials will make great progress.