Our company successfully developed a kind of precious metal/oxide composite membrane with catalytic properties and its preparation method, the method is prepared by magnetron sputtering technique first preparation containing precious metals bivariate or multivariate pseudo alloy system, auxiliary atmosphere subsequent annealing treatment, preparation of precious metal/oxide composite membrane with catalytic properties.This process environmental friendly, simple, without the use of toxic and harmful chemical reagent, the basement has no special requirements, the catalytic performance by two steps, the compound film film adhesion strong, in the REDOX reaction, chemical power source, pollutant degradation, optoelectronic devices, and other fields have good application potential and prospects, for the industrial application of catalytic membrane provides a new thought of universal technology.