Ceramic targets-three main factors affecting the properties of it

The purity of ceramic target has a great influence on the performance of sputtering film. The higher the purity is, the better the uniformity of sputtering film and the quality of batch products.  In addition, in order to prepare high performance ceramic target, we should control these factors, mainly including molding method, raw material size, sintering effect, today to analyze the main factors affecting the performance of ceramic target are those.

Forming method  

In order to reduce the porosity of ceramic target and improve the properties of thin films, the high density of sputtering ceramic target is required.  Low porosity, high density means that the grains in the ceramic body are closely arranged, and it is not easy to form destructive breakthroughs when bearing external loads or corrosive substances.  The forming method is the key to obtain calcium density ceramic embryo.  Ceramic target is usually formed by dry pressing, isostatic pressing, hot die casting and other methods.  Different methods have different characteristics and have different effects on the sinter and microstructure of curing rate ceramics.  

Granularity of raw materials  

The particle size of the raw material has a great influence on the quality of the film formed by the ceramic target. Only when the raw material is fine enough, the final fired product can form the microstructure and make it have good wear resistance.  Powder particles, the more fine, the greater the activity and can promote the sintering, porcelain strength is higher, also made of small particles can also be scattered because of corundum and different linear expansion coefficient of glass phase in the grain boundary caused by stress concentration, reduce the risk of cracking, fine grain can also hinder the development of micro cracks, not easy in a transgranular fracture, is beneficial to improve the fracture toughness, also can improve the wear resistance.  

The sintering  

For ceramic sintering, simply speaking is the densification process of ceramic green billet under high temperature.  With the increase of temperature and time, the bond between powder particles occurs, the strength of sintered body increases, the aggregate of powder particles into a strong polycrystalline sintered body with a certain microstructure, and obtain the required physical and mechanical properties of the product or material.  The densification rate and final structure of a sample often reflect what kind of heat treatment it has undergone.