Zirconium Dioxide (ZrO2)-Sputtering Target

Characteristic

Zirconium dioxide (ZrO₂), sometimes known as zirconia (not to be confused with zircon), is a white crystalline oxide of zirconium. Its most naturally occurring form, with a monoclinic crystalline structure, is the mineral baddeleyite. A dopant stabilized cubic structured zirconia, cubic zirconia, is synthesized in various colours for use as a gemstone and a diamond simulant.

Chemical formula：ZrO₂

Molar mass：123.218 g/mol

Appearance：white powder

Density：5.68 g/cm³

Melting point：2,715 °C (4,919 °F; 2,988 K)

Boiling point：4,300 °C (7,770 °F; 4,570 K)

Solubility in water：negligible

Solubility：soluble in HF, and hot H2SO4

Refractive index (nD)：2.13

Application

The main use of zirconia is in the production of hard ceramics, such as in dentistry (see below), with other uses including as a protective coating on particles of titanium dioxide pigments, as a refractory material, in insulation, abrasives and enamels. Stabilized zirconia is used in oxygen sensors and fuel cell membranes because it has the ability to allow oxygen ions to move freely through the crystal structure at high temperatures. This high ionic conductivity (and a low electronic conductivity) makes it one of the most useful electroceramics. Zirconium dioxide is also used as the solid electrolyte in electrochromic devices.

Zirconia is a precursor to the electroceramic lead zirconate titanate (PZT), which is a high-K dielectric, which is found in myriad components.