PVD coating colors corresponding to various target materials

Select the target type, material and gas (nitrogen, oxygen, acetylene, methane, etc.), determine the target and gas type, and then adjust the gas ratio, dosage, sputtering power, sputtering time, substrate processing temperature, sputtering temperature , sputtering time and other process parameters to prepare a color film layer, which is widely used in the decorative coating industry.

PVD coating method with adjustable target film color

1. Coating the metal film layer, the product to be coated is introduced into the coating chamber equipped with the metal target, and the pump is turned on to vacuumize and the heating device is used to heat the substrate, so that the background vacuum reaches 1×10-3Pa and reaches 80-150°C After the process temperature is reached, 10-1000 sccm of argon gas is introduced into the chamber, the sputtering power supply is started, the sputtering power is set to 1-15KW, and the coating time is 10-300S to obtain a metal film layer with a thickness of 1-100nm. The metal film layer is Copper (Cu), silver (Ag), aluminum (Al), chromium (Cr) and other metal film layers, or nickel copper (NiCu), nickel chromium (NiCr) and other alloy film layers;

2. Plating a low-refractive index film layer, the product coated with a metal film layer is passed into a target coating chamber equipped with a low-refractive index film layer, heated to a process temperature of 80-150°C, and passed into the chamber Process gas, set the sputtering power to 1-15KW, and the coating time to 1-300S to obtain a low-refractive-index film layer with a thickness of 1-100nm, and the low-refractive index film layer is a film such as silicon oxide or silicon nitride;

3. Coating of high refractive index film layer, the product coated with low refractive index film layer is passed into the target coating chamber equipped with high refractive index film layer, heated to a process temperature of 80-150 °C, and sent to the chamber The process gas is introduced, the sputtering power is set to 1-15KW, and the coating time is 1-300S to obtain a high-refractive-index film layer with a thickness of 1-100nm. The high-refractive-index film layer is titanium oxide, titanium nitride, zirconium oxide, Zirconium nitride, niobium oxide, niobium nitride, zinc oxide, indium oxide, aluminum oxide, iron oxide, chromium oxide, chromium nitride and other film layers, the process gas of this high and low refractive film layer is at least Ar, N2, O2 One, wherein the Ar gas flow rate is 10-1000 sccm, the N2 gas flow rate is 10-1000 sccm, and the O2 gas flow rate is 10-1000 sccm; 4. Repeat step 2 and step 3 several times to get different color film layers, repeat step 2 and step 3 for 1-100 times.

The following are the common materials of PVD vacuum coating decorative film and various decorative color coatings made of common gases:

Zirconium target + nitrogen: yellow green golden yellow

Zirconium target + methane: deep light black

Zirconium + oxygen: white, transparent film

Zirconium target + nitrogen + methane: gold, imitation rose gold

Chromium target + methane: dark light black

Chromium target + nitrogen: light black

Chromium target + nitrogen + methane: silver gray

Chromium target + oxygen: yellow, purple, green Chromium target + oxygen: silver

Stainless steel target + oxygen: purple

Stainless steel target + nitrogen: blue

Stainless steel target + methane: bright black

Stainless steel target + methane + nitrogen: blue black

Silicon + Nitrogen: Black

Silicon target + oxygen: turbid white, transparent film

Silicon target + methane: yellow, green, blue, black (only black can be adjusted if the target purity is higher than 99%)

Titanium target + oxygen: colorful cut-off color of optical film.

Titanium target + methane: deep light black (DLC preparation can not meet the standard)

Titanium target + nitrogen: imitation gold, brass, purple, red

Titanium target + nitrogen + methane: imitation rose gold, black green, retro yellow, brown, purple

Tungsten target + nitrogen: brown yellow

Tungsten target + methane: dark light black

Tungsten target + oxygen: purple, bright yellow, brown, blue.