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You are here: Home » Products » Thin film coating materials » Ceramic Sputtering Targets » Silicide Ceramic Sputtering Target » Zirconium Silicide (ZrSi2)-Sputtering Target

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Zirconium Silicide (ZrSi2)-Sputtering Target

  • 12039-90-6

  • ZrSi2

  • 401400ST

  • 99.5%

  • 8 inch dia x 0.25 inch th.

  • 234-911-1

Availability:

Characteristic


Zirconium(IV) silicide is an inorganic chemical compound with the chemical formula ZrSi2, consisting of zirconium and silicon atoms.


Chemical formula:ZrSi2

Molar mass:147.395 g/mol

Appearance:gray powder

Density:4.88 g/cm3

Melting point:1,620 °C (2,950 °F; 1,890 K)

Solubility in water:insoluble

Solubility:soluble in hydrofluoric acid



Application


Used as fine ceramic raw material powder, used in the production of semiconductor film production crucible.


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