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12067-57-1
Ti5Si3
221401PD
99.5%
-325 Mesh
235-082-9
Class 4.1
UN3178
PG III
Characteristic
Titanium disilicide (Ti5Si3) is an inorganic chemical compound.
Chemical formula：Ti5Si3
Formula weight: 323.76g/mol
Melting Point: 2130° C
Sensitivity: Ambient temperatures.
Solubility: Soluble in hydrofluoric acid. Insoluble in water.
Application
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.
Characteristic
Titanium disilicide (Ti5Si3) is an inorganic chemical compound.
Chemical formula：Ti5Si3
Formula weight: 323.76g/mol
Melting Point: 2130° C
Sensitivity: Ambient temperatures.
Solubility: Soluble in hydrofluoric acid. Insoluble in water.
Application
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.
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