Gallium Oxide (Ga2O3)-Sputtering Target

Characteristic

Gallium(III) trioxide is an inorganic compound with the formula Ga₂O₃. It exists as several polymorphs, all of which are white, water-insoluble solids. Although no commercial applications exist, Ga₂O₃ is an intermediate in the purification of gallium, which is consumed almost exclusively as gallium arsenide.

Chemical formula:Ga₂O₃

Molar mass:187.444 g/mol

Appearance:white crystalline powder

Density:6.44 g/cm³, alpha

             5.88 g/cm³, beta

Melting point:1,900 °C (3,450 °F; 2,170 K) alpha

                       1725 °C, beta

Solubility in water:insoluble

Solubility:soluble in most acids

Application

Gallium(III) oxide has been studied in the use of lasers, phosphors, and luminescent materials. It has also been used as an insulating barrier in tight junctions.Monoclinic β-Ga₂O₃ is used in gas sensors and luminescent phosphors and can be applied to dielectric coatings for solar cells. This stable oxide has also shown potential for deep-ultraviolet transparent conductive oxides, and transistor applications.

ε-Ga₂O₃ thin films deposited on sapphire show potential applications as solar-blind UV photodetector.

Thin Ga₂O₃ films are of commercial interest as gas sensitive materials and Ga₂O₃. Ellipsometry is a procedure that can be used to determine optical functions of the β-Ga₂O₃.

β-Ga₂O₃ is used in the production of Ga₂O₃-Al₂O₃ catalyst.

Ga2O3_MSDS.pdf