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Zirconium Silicide (ZrSi2)-Sputtering Target
Product Description
Characteristic
Zirconium(IV) silicide is an inorganic chemical compound with the chemical formula ZrSi2, consisting of zirconium and silicon atoms.
Chemical formula:ZrSi2
Molar mass:147.395 g/mol
Appearance:gray powder
Density:4.88 g/cm3
Melting point:1,620 °C (2,950 °F; 1,890 K)
Solubility in water:insoluble
Solubility:soluble in hydrofluoric acid
Application
Used as fine ceramic raw material powder, used in the production of semiconductor film production crucible.