Zirconium Silicide (ZrSi2)-Sputtering Target

Characteristic

Zirconium(IV) silicide is an inorganic chemical compound with the chemical formula ZrSi₂, consisting of zirconium and silicon atoms.

Chemical formula：ZrSi₂

Molar mass:147.395 g/mol

Appearance:gray powder

Density:4.88 g/cm³

Melting point:1,620 °C (2,950 °F; 1,890 K)

Solubility in water:insoluble

Solubility:soluble in hydrofluoric acid

Application

Used as fine ceramic raw material powder, used in the production of semiconductor film production crucible.

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