What to Look for When Choosing a Chromium Sputtering Target?

Chromium sputtering target basics

When choosing a chromium sputtering target, there are several factors to consider to ensure the target meets your specific needs. Here are some important considerations to keep in mind: 

1. Purity:

The purity of the chromium sputtering target is a critical factor that can impact the quality and performance of the deposited thin films. Look for targets with high purity levels, ideally over 99.99%. 

2. Homogeneity:

The target's homogeneity is important to ensure uniform deposition of the thin film over the substrate surface. Inhomogeneities in the target can lead to non-uniform deposition and lower film quality. Check for targets that have a low sputter rate variation across the surface. 

3. Grain size:

The grain size of the target can affect the target's sputter rate and the quality of the deposited films. Larger grain sizes can lead to higher sputter rates, but can also cause film defects. Look for targets with a consistent and fine-grained microstructure. 

4. Density:

The density of the target can impact the target's lifetime and sputter rate. Higher density targets tend to have longer lifetimes and higher sputter rates, while lower density targets tend to have lower sputter rates but may be more prone to cracking. Check for targets with a high density, ideally above 99% of theoretical density. 

5. Size and shape:

The size and shape of the target are also important considerations. Choose a target size and shape that matches your specific sputtering chamber and substrate size, and also consider the target's weight and ease of handling. 

6. Price:

Price is always an important consideration when choosing a sputtering target. However, be cautious of choosing the cheapest option, as lower-priced targets may have lower purity, density, or other quality issues that could lead to lower film quality or shorter target lifetime. Instead, choose a target that offers a good balance between price and quality. 

7. Bonding:

The method of bonding the target to the backing plate is important to ensure good thermal conductivity and mechanical stability. Look for targets that are bonded using high-quality bonding techniques such as diffusion bonding, which can provide better thermal conductivity and mechanical strength. 

8. Surface finish:

The surface finish of the target can affect the quality of the deposited thin film. Rough surfaces can cause arcing and lower film quality, while smooth surfaces can provide better film adhesion and thickness uniformity. Check for targets with a polished or finely ground surface finish. 

9. Handling and packaging:

The handling and packaging of the target can impact its quality and performance. Look for targets that are shipped in a protective and clean packaging that prevents contamination and damage during transportation and storage. 

10. Supplier reliability:

The reliability and reputation of the target supplier is also an important consideration. Choose a supplier with a good track record and experience in providing high-quality targets and support services, such as target bonding, recycling, and custom target manufacturing.

Overall, choosing the right chromium sputtering target can impact the quality and performance of the thin films deposited by sputtering. Consider the purity, homogeneity, grain size, density, size and shape, and price when selecting a target that meets your specific needs. By considering these factors, you can choose a chromium sputtering target that meets your specific requirements and provides high-quality thin films with good adhesion, uniformity, and other desired properties.