Cerium Fluoride (CeF3)-Sputtering Target

Characteristic

Cerium(III) fluoride (or cerium trifluoride), CeF₃, is an ionic compound of the rare earth metal cerium and fluorine.

It appears as a mineral in the form of fluocerite-(Ce).

Chemical formula：CeF₃

Molar mass： 197.12 g/mol

Density： 6.16 g/cm³ (at 20 °C)

Melting point： 1,460 °C (2,660 °F; 1,730 K)

 

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CeF3_MSDS.pdf