Ceramic targets-what are the types of them?
Publish Time: 2022-01-24 Origin: Site
What are the types of high temperature ceramic materials?
According to the application, it can be divided into semiconductor associated ceramic target, display ceramic target, magnetic recording ceramic target, optical recording ceramic target, superconducting ceramic target, giant magnetoresistance ceramic target, etc.
Semiconductor association ceramic target material (HfO, the SiO, Si3N4, MoSi, slipped, WSi, TiSi, PLZT, ITO, is mainly used in gate dielectric film. Ton film, diffusion blocking film, capacitor insulation film, transparent conductive film.
Display ceramic target ZnS-Mn, ZnS-TB, ZnS-SM, Cas-EU, SRS-Ce,Si3N4,MgO, mainly used in electroluminescent film luminescence layer, electroluminescent film insulation layer, disk, etc.
Magnetic recording ceramic target Si3N4, mainly used in magnetic head, magnetic disc (MO) protection.
Optical recording ceramic rake Si3N4, mainly used in optical disc protection film.
Superconducting ceramic target YbaCuO, BiSrCaCuO, mainly used in superconducting film.
Giant magnetoresistance ceramic target is mainly used in thin-film solar cell Windows.
Other Targets, In₂O₃, LiNbO₃, BaTiO₃, PZT. ZnO, mainly used In solar cells, piezoelectric thin films .
According to chemical composition, it can be divided into oxide ceramic target, silicide ceramic target, nitride ceramic target, fluoride ceramic target and sulfide ceramic target, etc. The planar display ITO ceramic target has been widely produced and applied in China. Ceramic targets for high dielectric insulation films and giant magnetoresistance ceramic targets have broad application prospects.